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三(二甲基氨基)氯硅烷
tris(dimethylamino)chlorosilane
chloro-tris-dimethylamino-silane, 1-Chloro-N,N,N',N',N'',N''-hexamethylsilanetriaminato(2-), Silanetriamine, 1-chloro-N,N,N',N',N'',N''-hexamethyl-, Chlor-tris-dimethylamino-silan, tris(dimethylamino)chlorosilane, 1-Chloro-N,N,N',N',N'',N''-hexamethylsilanetriamine, Silanetriamine,1-chloro-N,N,N',N',N'',N''-hexamethyl, EINECS 236-331-4, Si(N(CH3)2)3Cl, MFCD00048004, Tris-(dimethylamino)-chlorsilan
CAS号: 13307-05-6
IUPAC名称: N-[chloro-bis(dimethylamino)silyl]-N-methylmethanamine
分子式: C6H18ClN3Si
分子量: 195.766
InChI: InChI=1S/C6H18ClN3Si/c1-8(2)11(7,9(3)4)10(5)6/h1-6H3
InChIKey: YLZCZVGQEADVNK-UHFFFAOYSA-N
SMILES: CN(C)[Si](N(C)C)(N(C)C)Cl
EINECS: -
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